http://image-sensors-world.blogspot.com/Interesting development that is about to take off;
Lithography smaller than 10nm is now possible on a manufacturing scale.
ASML joint with some partners (intel, Samsung, and more) some years ago to collect money for this project development.
Lithography beyond 10nm involves the use of UV light that has to be steered with mirrors instead of lenses.
A completely new way of production and a new reliable production line had to be developed.